Implantation and sputtering of ge and si ions into SiO2 substrates using electric fields for acceleration and optimisation of laser-produced Ion streams used for modification of semiconductor materials

Rosinski, Marcin
Wolowski, Jerzy
Yerci, Selçuk
Parys, Piotr
Turan, Raşit
Badziak, Jan
Czarnecka, Agata
Gasior, Pawel
Pisarek, Marcin
Laser plasma has been proved to be a potential source of multiply charged ions which could support the growing demands for high-current ion beams. To optimize efficiency of the ion implantation technology selection of proper laser beam characteristics is very important and should be investigated. With LIS, several variables can and must be controlled. The properties of ions (current densities, the ion charge state, angular and energy distributions) depend on target material and the laser energy, pulse duration and intensity on the target surface. So, the characteristics of laser-produced ion streams should be determined with the use of precise ion diagnostic methods. Based on the preliminary results for acceleration of ions produced with the use of a repetitive laser system at IPPLM the special electrostatic-acceleration system has been designed and prepared. This device permits to accelerate ions having charge states of 1+ to energies up to ∼40 keV. The movable target holder was located inside the cylindrical box connected with a high-voltage source (up to 50 kV at 50 mA). The accelerated Ge and Si ions was implanted to SiO2/Si substrates and analyzed. This contribution is concerned mainly on the analysis and optimization of laser-produced Ge and Si ion streams as well as on investigation of the direct implantation of these ions into SiO2 substrates. Targets were irradiated with the use of repetitive (up to 10 Hz) laser with energy up to 700 mJ in one pulse, at radiation intensities of ∼1011 W/cm2. The ion stream parameters were measured using the time-of-fight method. The depth of ion implantation was determined by X-Ray Photoelectron Spectroscope (XPS). After the implantation the samples were annealed in different temperatures in range of to create nanocrystal structures and then analyzed by means of Raman Spectroscopy, Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). The work has been performed within SEMINANO project supported by EC (within 6FP).
Symposium FF – Synthesis and Surface Engineering of Three-Dimensional Nanostructures ( 2007)


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Due to the growing demands for high-current ion beams, laser plasma as a potential source of multiple charged ions has been investigated. Selection of proper laser beam characteristics is very important for efficiency of the ion implantation technology.
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Citation Formats
M. Rosinski et al., “Implantation and sputtering of ge and si ions into SiO2 substrates using electric fields for acceleration and optimisation of laser-produced Ion streams used for modification of semiconductor materials,” 2008, vol. 1054, Accessed: 00, 2021. [Online]. Available: