Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
A Low Cost Rate Grade Nickel Microgyroscope
Date
2006-11-08
Author
Alper, Said Emre
Silay, Kanber Mithat
Akın, Tayfun
Metadata
Show full item record
Item Usage Stats
150
views
0
downloads
Cite This
URI
https://hdl.handle.net/11511/76240
Collections
Unverified, Conference / Seminar
Suggestions
OpenMETU
Core
A low-cost rate-grade nickel microgyroscope
Alper, Said Emre; Silay, Kanber Mithat; Akın, Tayfun (Elsevier BV, 2006-11-08)
This paper presents a low-cost microgyroscope with a resolution in the rate-grade at atmospheric pressure, which is fabricated using a CMOScompatible nickel electrofonning process. Angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense modes close to each other using symmetric suspensions and electrostatic frequency tuning; whereas, undesired mechanical coupling between the two modes during matched mode operation is reduced by the fully decoupled g...
A High Performance Hybrid CMOS Microaccelerometer
Salian, A; Külah, Haluk; Yazdi, N; He, G; Najafi, Khalil (2000-06-04)
A low cost continuous H2-CH4 sensor assembly
Oğulgonen, Celal Güvenç; Çalışan, Atalay; Üner, Deniz; Kıncal, Serkan (null; 2018-03-15)
A low cost uncooled infrared microbolometer focal plane array using the CMOS n-well layer
Tezcan, DS; Eminoglu, S; Akar, OS; Akın, Tayfun (2001-01-25)
This paper reports a low-cost, 256-pixel uncooled infrared microbolometer focal plane array (FPA) implemented using a 0.8 mum CMOS process where the n-well layer is used as the active microbolometer material. The suspended n-well structure is obtained by simple front-end bulk etching of the fabricated CMOS dies, while the n-well region is protected from etching by electrochemical etch-stop technique within a TMAH solution. Electrical connections to the suspended n-well are obtained with polysilicon intercon...
A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing
Terzioglu, Yunus; Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (2015-11-01)
This paper presents an out-of-plane (z-axis) accelerometer, which incorporates the use of two different MEMS capacitive electrode structures in combination for implementing a linear closed-loop system. During the implementation, the complexity of the design and fabrication steps of the sensing element is kept at a minimum. The proposed accelerometer uses capacitive MEMS sensing element fabricated with a 4-mask process. This sensing element includes a comb finger type lateral electrode and a vertical paralle...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
S. E. Alper, K. M. Silay, and T. Akın, “A Low Cost Rate Grade Nickel Microgyroscope,” 2006, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/76240.