A Low Cost Rate Grade Nickel Microgyroscope

Alper, Said Emre
Silay, Kanber Mithat
Akın, Tayfun


A low-cost rate-grade nickel microgyroscope
Alper, Said Emre; Silay, Kanber Mithat; Akın, Tayfun (Elsevier BV, 2006-11-08)
This paper presents a low-cost microgyroscope with a resolution in the rate-grade at atmospheric pressure, which is fabricated using a CMOScompatible nickel electrofonning process. Angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense modes close to each other using symmetric suspensions and electrostatic frequency tuning; whereas, undesired mechanical coupling between the two modes during matched mode operation is reduced by the fully decoupled g...
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This paper presents an out-of-plane (z-axis) accelerometer, which incorporates the use of two different MEMS capacitive electrode structures in combination for implementing a linear closed-loop system. During the implementation, the complexity of the design and fabrication steps of the sensing element is kept at a minimum. The proposed accelerometer uses capacitive MEMS sensing element fabricated with a 4-mask process. This sensing element includes a comb finger type lateral electrode and a vertical paralle...
Citation Formats
S. E. Alper, K. M. Silay, and T. Akın, “A Low Cost Rate Grade Nickel Microgyroscope,” 2006, Accessed: 00, 2021. [Online]. Available: https://hdl.handle.net/11511/76240.