A low cost continuous H2-CH4 sensor assembly

Oğulgonen, Celal Güvenç
Çalışan, Atalay
Üner, Deniz
Kıncal, Serkan


A simple out of plane capacitive MEMS accelerometer utilizing lateral and vertical electrodes for differential sensing
Terzioglu, Yunus; Kose, Talha; Azgın, Kıvanç; Akın, Tayfun (2015-11-01)
This paper presents an out-of-plane (z-axis) accelerometer, which incorporates the use of two different MEMS capacitive electrode structures in combination for implementing a linear closed-loop system. During the implementation, the complexity of the design and fabrication steps of the sensing element is kept at a minimum. The proposed accelerometer uses capacitive MEMS sensing element fabricated with a 4-mask process. This sensing element includes a comb finger type lateral electrode and a vertical paralle...
A Low Cost Rate Grade Nickel Microgyroscope
Alper, Said Emre; Silay, Kanber Mithat; Akın, Tayfun (2006-11-08)
A 2D Slotted Rod Type PhC Cavity Inertial Sensor Design for Impact Sensing
Orsel, Ogulcan Emre; ERDİL, MERTCAN; Kocaman, Serdar (Institute of Electrical and Electronics Engineers (IEEE), 2020-02-01)
A tunable 2D rod type Si Photonic Crystal cavity based impact sensing configuration is proposed and numerically analyzed. The cavity is sandwiched by perfect electric conductor (PEC) boundaries in order to provide out-of-plane light confinement. An on-purpose air slot is introduced between the Si rods and top PEC plate moving the light confinement into the slotted region and making the cavity highly responsive to the displacement of top PEC boundary. Optomechanical coupling strength is calculated to be on t...
A wireless batch sealed absolute capacitive pressure sensor
Akar, O.; Akın, Tayfun; Najafi, K. (Elsevier BV, 2001-12-15)
This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 mum-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire ...
A Low-power capacitive integrated CMOS readout circuitry for high performance MEMS accelerometers
İncedere, Osman Samet; Akın, Tayfun; Eminoğlu, Selim; Department of Electrical and Electronics Engineering (2013)
This thesis presents a low power capacitive integrated CMOS readout circuitry for high performance MEMS accelerometers. It proposes a linearized model of the complete closed loop accelerometer system, which makes easier of designing and analyzing the system. Designed readout circuitry offers low noise, wide dynamic range and high linearity system with very low power consumption. Designed readout circuit includes proportional integral (PI) controller circuit, which significantly decreases the proof mass defl...
Citation Formats
C. G. Oğulgonen, A. Çalışan, D. Üner, and S. Kıncal, “A low cost continuous H2-CH4 sensor assembly,” 2018, Accessed: 00, 2021. [Online]. Available: file:///C:/Users/DELL/Documents/resume/IHTEC_2018_Proceedings.pdf.