Development of atomic force microscopy system and kelvin probe microscopy system for use in semiconductor nanocrystal characterization

Bostancı, Umut
Atomic Force Microscopy (AFM) and Kelvin Probe Microscopy (KPM) are two surface characterization methods suitable for semiconductor nanocrystal applications. In this thesis work, an AFM system with KPM capability was developed and implemented. It was observed that, the effect of electrostatic interaction of the probe cantilever with the sample can be significantly reduced by using higher order resonant modes for Kelvin force detection. Germanium nanocrystals were grown on silicon substrate using different growth conditions. Both characterization methods were applied to the nanocrystal samples. Variation of nanocrystal sizes with varying annealing temperature were observed. Kelvin spectroscopy measurements made on nanocrystal samples using the KPM apparatus displayed charging effects.


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This thesis reports the development of high-performance symmetric and decoupled micromachined gyroscopes for tactical-grade inertial measurement applications. The symmetric structure allows easy matching of the resonance frequencies of the drive and sense modes of the gyroscopes for achieving high angular rate sensitivity; while the decoupled drive and sense modes minimizes mechanical cross-coupling for low-noise and stable operation. Three different and new symmetric and decoupled gyroscope structures with...
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Üçer, Begüm; Parlak, Mehmet; Department of Physics (2009)
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Şen, Sema; Yurtseven, Hasan Hamit; Department of Physics (2009)
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Citation Formats
U. Bostancı, “Development of atomic force microscopy system and kelvin probe microscopy system for use in semiconductor nanocrystal characterization,” M.S. - Master of Science, Middle East Technical University, 2007.