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Thickness analysis of thin films by energy dispersive x-ray spectroscopy
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Date
2010
Author
Canlı, Sedat
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EDS is a tool for quantitative and qualitative analysis of the materials. In electron microscopy, the energy of the electrons determines the depth of the region where the X-rays come from. By varying the energy of the electrons, the depth of the region where the X-rays come from can be changed. If a thin film is used as a specimen, different quantitative ratios of the elements for different electron energies can be obtained. Unique thickness of a specific film on a specific substrate gives unique energy-ratio diagram so the thickness of a thin film can be calculated by analyzing the fingerprints of the energy-ratio diagram of the EDS data obtained from the film.
Subject Keywords
X-ray spectroscopy
URI
http://etd.lib.metu.edu.tr/upload/12612822/index.pdf
https://hdl.handle.net/11511/20293
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Graduate School of Natural and Applied Sciences, Thesis
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S. Canlı, “Thickness analysis of thin films by energy dispersive x-ray spectroscopy,” M.S. - Master of Science, Middle East Technical University, 2010.
