Preparation of BTS-BCT thin films by chemical solution deposition and their characterization /

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2015
Akbay, Berk
In the presented thesis, lead-free Ba(Ti0.88Sn0.12)O3-0.3(Ba0.7Ca0.3)TiO3 (BTS-BCT) thin films were deposited on (111)-Pt/TiO2/SiO2/(100)-Si substrates using chemical solution deposition method and then the effect of process parameters were investigated to obtain optimum parameters of these lead-free thin films. The phase was selected near to the morphotropic phase boundary (MPB) to increase the number of polarization directions where rhombohedral and tetragonal phases exist together. In this study, the effect of sintering temperatures on microstructure, dielectric and ferroelectric properties were studied systematically. Among the various high-quality BTS-BCT thin films with uniform thickness, the optimum dielectric and ferroelectric responses were observed for films sintered at 850oC for 1 h sintering time. The thickness was kept constant for all measurements as 500 nm (thirteen layered films). BTS-BCT thin films sintered at 850oC for 1 h exhibited effective remnant polarization and coercive field values of 4.11 μC/cm2 and 57.8 kV/cm, together with a dielectric constant and low loss tangent of 113.4 and 5.46 %, respectively, at a frequency of 600 kHz due to perovskite phase formed by crystallization, minimum surface porosity and larger grains obtained at this temperature.
Citation Formats
B. Akbay, “Preparation of BTS-BCT thin films by chemical solution deposition and their characterization /,” M.S. - Master of Science, Middle East Technical University, 2015.