Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes

Date

2011-06-09

Author

Eminoglu, B.
Alper, S.E.
Akın, Tayfun

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This paper presents a novel self oscillation loop with a very simple architecture that is independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes, providing identical start-up performance at different ambient conditions. The new self-oscillation loop circuitry has been fabricated in a 0.6μm CMOS process, tested with a fabricated MEMS gyroscope, and demonstrated start-up characteristics without any overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√hr and a bias instability value of 3°/hr are achieved using this new self-oscillation loop.

Subject Keywords

MEMS gyroscopes, 0.6μm CMOS process, Self-oscillation loop

URI

https://hdl.handle.net/11511/32725

DOI

https://doi.org/10.1109/transducers.2011.5969590

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

B. Eminoglu, S. E. Alper, and T. Akın, “Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/32725.