Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes

Eminoglu, B.
Alper, S.E.
Akın, Tayfun
This paper presents a novel self oscillation loop with a very simple architecture that is independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes, providing identical start-up performance at different ambient conditions. The new self-oscillation loop circuitry has been fabricated in a 0.6μm CMOS process, tested with a fabricated MEMS gyroscope, and demonstrated start-up characteristics without any overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√hr and a bias instability value of 3°/hr are achieved using this new self-oscillation loop.


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Two classical approaches are compared in various respects for the design of wideband planar BPF's without parallel coupled lines, namely, BPF's designed by pole placement with contributing Unit Elements (UE) and inverter coupled resonator filters designed from LP prototypes. It is shown that the circuit obtained by direct BP synthesis is a special case of inverter coupled filter with inverters converted into single Unit Elements. It is also shown that if the inverters are converted into odd number of UE's t...
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Citation Formats
B. Eminoglu, S. E. Alper, and T. Akın, “Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes,” 2011, Accessed: 00, 2020. [Online]. Available: