Show/Hide Menu
Hide/Show Apps
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Open Science Policy
Open Science Policy
Open Access Guideline
Open Access Guideline
Postgraduate Thesis Guideline
Postgraduate Thesis Guideline
Communities & Collections
Communities & Collections
Help
Help
Frequently Asked Questions
Frequently Asked Questions
Guides
Guides
Thesis submission
Thesis submission
MS without thesis term project submission
MS without thesis term project submission
Publication submission with DOI
Publication submission with DOI
Publication submission
Publication submission
Supporting Information
Supporting Information
General Information
General Information
Copyright, Embargo and License
Copyright, Embargo and License
Contact us
Contact us
Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes
Date
2011-06-09
Author
ŞAHİN, EROL
Alper, S.E.
Akın, Tayfun
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
224
views
0
downloads
Cite This
This paper presents the illustrative measurement results of a comprehensive study for understanding the effects of different drive-mode control electronic architectures on the overall performance of a micromachined capacitive vibratory gyroscope. Three different control electronic architectures have been implemented for generating either (a) square wave, (b) sinusoidal wave or (c) complex waveform driving signals for the gyroscope under test. Performance characterization of the gyroscope with these control electronics indicate that the electronics generating the sinusoidal wave drive waveform provides the lowest white noise among the others, with an angle random walk reaching down to 0.03°/hr 1/2 at least twice lower than its closest competitor. On the other hand, the bias stability of the gyroscope is observed to be almost unchanged for electronics that generate different drive waveforms indicating that the bias stability is still dominated by a noise source other than the drive-mode control electronic architectures.
Subject Keywords
Gyroscope
,
Angular rate sensor
,
Drive-mode control electronics
,
Automatic gain control
URI
https://hdl.handle.net/11511/42391
DOI
https://doi.org/10.1109/transducers.2011.5969566
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar
Suggestions
OpenMETU
Core
Development of electrochemical etch-stop techniques for integrated MEMS sensors
Yaşınok, Gözde Ceren; Akın, Tayfun; Department of Electrical and Electronics Engineering (2006)
This thesis presents the development of electrochemical etch-stop techniques (ECES) to achieve high precision 3-dimensional integrated MEMS sensors with wet anisotropic etching by applying proper voltages to various regions in silicon. The anisotropic etchant is selected as tetra methyl ammonium hydroxide, TMAH, considering its high silicon etch rate, selectivity towards SiO2, and CMOS compatibility, especially during front-side etching of the chip/wafer. A number of parameters affecting the etching are inv...
Modeling and simulation of a navigation system with an IMU and a Magnetometer
Kayasal, Uğur; Özgören, Mustafa Kemal; Department of Mechanical Engineering (2007)
In this thesis, the integration of a MEMS based inertial measurement unit and a three axis solid state magnetometer are studied. It is a fact that unaided inertial navigation systems, especially low cost MEMS based navigation systems have a divergent behavior. Nowadays, many navigation systems use GPS aiding to improve the performance, but GPS may not be applicable in some cases. Also, GPS provides the position and velocity reference whereas the attitude information is extracted through estimation filters. ...
Reliability improvement of RF MEMS devices based on lifetime measurements
Gürbüz, Ozan Doğan; Demir, Şimşek; Akın, Tayfun; Department of Electrical and Electronics Engineering (2010)
This thesis presents fabrication of shunt, capacitive contact type RF MEMS switches which are designed according to given mm-wave performance specifications. The designed switches are modified for investigation in terms of reliability and lifetime. To observe the real-time performance of switches a time domain measurement setup is established and a CV (capacitance vs. voltage) curve measurement system is also included to measure CV curves, pull-in and hold-down voltages and the shifts of these due to actuat...
Performance comparison of inverter control techniques used for the supply of a linear PM synchronous actuator
Ben Salem, I.; Ouni, L. El Amraoui; Gillon, F.; Benrejeb, M.; Brochet, P. (2011-09-10)
This paper presents performance comparison of three inverter control techniques. These techniques are respectively hysteresis control, MAIM control and direct voltage control (DVC). They are applied for a PM Linear Tubular Synchronous Actuator (PAITI,SA) drive fed, using a three phase voltage source inverter (VSI). This VSI is working with constant switching time intervals as in the standard torque control DTC system.
Performance evaluation of piezoelectric sensor/actuator on active vibration control of a smart beam
Şahin, Melin (SAGE Publications, 2011-01-01)
In this paper the performance of a piezoelectric sensor/actuator pair and self-sensing piezoelectric actuator on the investigation of vibration characteristics and active vibration control of a smart beam are presented. The performance of piezoelectric patches on actuation and sensing is evaluated by investigating the vibration characteristics of the smart beam via various excitation mechanisms and transduction systems. For active vibration suppression of the smart beam, robust controllers are designed and ...
Citation Formats
IEEE
ACM
APA
CHICAGO
MLA
BibTeX
E. ŞAHİN, S. E. Alper, and T. Akın, “Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42391.