Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes

2011-06-09
ŞAHİN, EROL
Alper, S.E.
Akın, Tayfun
This paper presents the illustrative measurement results of a comprehensive study for understanding the effects of different drive-mode control electronic architectures on the overall performance of a micromachined capacitive vibratory gyroscope. Three different control electronic architectures have been implemented for generating either (a) square wave, (b) sinusoidal wave or (c) complex waveform driving signals for the gyroscope under test. Performance characterization of the gyroscope with these control electronics indicate that the electronics generating the sinusoidal wave drive waveform provides the lowest white noise among the others, with an angle random walk reaching down to 0.03°/hr 1/2 at least twice lower than its closest competitor. On the other hand, the bias stability of the gyroscope is observed to be almost unchanged for electronics that generate different drive waveforms indicating that the bias stability is still dominated by a noise source other than the drive-mode control electronic architectures.

Suggestions

Development of electrochemical etch-stop techniques for integrated MEMS sensors
Yaşınok, Gözde Ceren; Akın, Tayfun; Department of Electrical and Electronics Engineering (2006)
This thesis presents the development of electrochemical etch-stop techniques (ECES) to achieve high precision 3-dimensional integrated MEMS sensors with wet anisotropic etching by applying proper voltages to various regions in silicon. The anisotropic etchant is selected as tetra methyl ammonium hydroxide, TMAH, considering its high silicon etch rate, selectivity towards SiO2, and CMOS compatibility, especially during front-side etching of the chip/wafer. A number of parameters affecting the etching are inv...
Experimental evaluation of cable drum systems as linear motion sensors
KILIÇ, ERGİN; Dölen, Melik; Koku, Ahmet Buğra (2011-04-15)
This study evaluates cable-drum mechanisms as linear motion sensors for certain CNC applications. In this work, the dynamical attributes of a generic device are studied experimentally. The conducted research indicates that despite the significant traction force induced between the cable and its drum, small fluctuations in mechanism's speed yields a considerable (micro) slip at the interface.
Performance comparison of inverter control techniques used for the supply of a linear PM synchronous actuator
Ben Salem, I.; Ouni, L. El Amraoui; Gillon, F.; Benrejeb, M.; Brochet, P. (2011-09-10)
This paper presents performance comparison of three inverter control techniques. These techniques are respectively hysteresis control, MAIM control and direct voltage control (DVC). They are applied for a PM Linear Tubular Synchronous Actuator (PAITI,SA) drive fed, using a three phase voltage source inverter (VSI). This VSI is working with constant switching time intervals as in the standard torque control DTC system.
Modeling and simulation of a navigation system with an IMU and a Magnetometer
Kayasal, Uğur; Özgören, Mustafa Kemal; Department of Mechanical Engineering (2007)
In this thesis, the integration of a MEMS based inertial measurement unit and a three axis solid state magnetometer are studied. It is a fact that unaided inertial navigation systems, especially low cost MEMS based navigation systems have a divergent behavior. Nowadays, many navigation systems use GPS aiding to improve the performance, but GPS may not be applicable in some cases. Also, GPS provides the position and velocity reference whereas the attitude information is extracted through estimation filters. ...
Vibration suppression of an elastic beam via sliding mode control
Itik, Mehmet; SALAMCİ, METİN UYMAZ; Ulker, F. Demet (2005-09-09)
This paper presents experimental results of sliding mode control (SMC) technique applied to an elastic beam. The aim of the controller is to suppress first two vibration modes of the beam. Mathematical model of the beam is a finite dimensional model obtained from the Bernoulli-Euler beam equation. As the system states are to be available in order to design the SMC, an observer has been designed to obtain the states of the system by measuring tip deflection of the beam. By using observed states of the finite...
Citation Formats
E. ŞAHİN, S. E. Alper, and T. Akın, “Experimental evaluation of alternative drive-mode control electronics developed for high-performance MEMS gyroscopes,” 2011, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42391.