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An Optimized Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes
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10.1016j.proeng.2011.12.323.pdf
Date
2011-09-07
Author
Eminoglu, Burak
Alper, Said Emre
Akın, Tayfun
Metadata
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This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
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This paper presents an optimized analytical design procedure for the drive mode analog controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-up is analyzed in detail including the effect of the limited voltage swing of the controller circuitry. As a result, an optimum design procedure is developed for controller design, which is also experimentally verified in a practical implementation demonstrating a settling time of only 50msec without any overshoot, for a gyroscope having a quality factor (Q-factor) of 50,000. The new design procedure makes drive mode settling times almost insensitive to the Q-factor, making it suitable to obtain very-fast-starting MEMS gyroscopes even if they are packaged under high-vacuum. (C) 2011 Published by Elsevier Ltd.
Subject Keywords
MEMS gyroscopes
,
Self-oscillation loop
,
Drive mode controller
URI
https://hdl.handle.net/11511/38386
DOI
https://doi.org/10.1016/j.proeng.2011.12.323
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar