An Optimized Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes

Date

2011-09-07

Author

Eminoglu, Burak
Alper, Said Emre
Akın, Tayfun

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This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

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This paper presents an optimized analytical design procedure for the drive mode analog controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-up is analyzed in detail including the effect of the limited voltage swing of the controller circuitry. As a result, an optimum design procedure is developed for controller design, which is also experimentally verified in a practical implementation demonstrating a settling time of only 50msec without any overshoot, for a gyroscope having a quality factor (Q-factor) of 50,000. The new design procedure makes drive mode settling times almost insensitive to the Q-factor, making it suitable to obtain very-fast-starting MEMS gyroscopes even if they are packaged under high-vacuum. (C) 2011 Published by Elsevier Ltd.

Subject Keywords

MEMS gyroscopes, Self-oscillation loop, Drive mode controller

URI

https://hdl.handle.net/11511/38386

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar