A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers

Date

2013-08-01

Author

Aydin, Osman
Akın, Tayfun

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This paper proposes a novel bulk-micromachined MEMS accelerometer employing split interdigitated sense fingers that provide a fully differential signal interface, where the accelerometer can be fabricated by a modified silicon-on-glass process using a silicon-on-insulator (SOI) wafer. The accelerometer combines the feasibility of fabricating large mass and high aspect ratio structures using bulk-micromachining together with the highly sensitive split interdigitated sense finger triplets that are connected with multilayer metal interconnects on an SOI-glass bonded wafer. The fabricated accelerometer is packaged for system level tests with a fourth-order Sigma-Delta readout circuitry to evaluate its performance. The measurement results show that the accelerometer achieves a bias instability of 50 mu g and a velocity random walk of 11.5 mu g/root Hz. The accelerometer operates in a range of +/- 5 g with a nonlinearity of 1140 ppm

Subject Keywords

Accelerometer, Bulk-micromachining, Fully-differential detection, Split interdigitated fingers

URI

https://hdl.handle.net/11511/32829

Journal

IEEE SENSORS JOURNAL

DOI

https://doi.org/10.1109/jsen.2013.2264667

Collections

Department of Electrical and Electronics Engineering, Article

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Citation Formats

O. Aydin and T. Akın, “A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers,” IEEE SENSORS JOURNAL, pp. 2914–2921, 2013, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/32829.