A development tool for design and analysis of MEMS based EM energy scavengers

Turkyilmaz, Serol
Külah, Haluk
Muhtaroglu, Ali
This paper presents a development tool for estimating the performance of an electromagnetic (EM) vibration-to-electrical MEMS energy scavenger for low power mobile computing and wireless sensor applications. The tool takes design and excitation parameters as input, and estimates output voltage waveforms and power levels. It has been correlated against validation data, and used for early evaluation and design of new MEMS modules, which could not be optimized using off-the-shelf design packages. The tool was used to optimize the second generation MEMS scavenger with more than three orders of magnitude efficiency improvement compared to first generation, in converting low frequency (70-150 Hz) environmental vibrations to electrical energy. The predicted gains have later been verified on a macro-scale prototype. To our knowledge, this tool is a first of its kind.


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Turkyilmaz, Serol; Külah, Haluk; Muhtaroglu, Ali (2010-12-01)
This paper presents an electromagnetic (EM) vibration to electrical power generator which can effectively harvest energy from low frequency external vibrations. The reported second generation MEMS energy scavenger module up-converts low frequency environmental vibrations before mechanical-to-electrical conversion. Power is generated through planar electromagnetic induction using a magnet on the low frequency actuation plane, and coils on the high frequency resonance plane. The proposed approach has been dem...
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AlGaN/GaN high electron mobility transistors (HEMTs) are popular solid-state electronic devices used for high power and frequency applications. Concerns exist about their reliability and performance due to harsh self-heating effects, which makes it necessary to correctly characterize their thermal performance. In the past many researchers used thermal modelling approaches for thermal characterization since variety of limiting factors still exist in the experimental measurements. In this study diversities an...
The data acquisition and calibration system for the ATLAS Semiconductor Tracker
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Citation Formats
S. Turkyilmaz, H. Külah, and A. Muhtaroglu, “A development tool for design and analysis of MEMS based EM energy scavengers,” 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/35460.