Interfacial and structural properties of sputtered HfO2 layers

Download

index.pdf

Date

2009-07-01

Author

AYGÜN ÖZYÜZER, GÜLNUR
Yıldız, İlker

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

147
views

0
downloads

Magnetron sputtered HfO2 layers formed on a heated Si substrate were studied by spectroscopic ellipsometer (SE), x-ray diffraction (XRD), Fourier transform infrared (FTIR), and x-ray photoelectron spectroscopy (XPS) depth profiling techniques. The results show that the formation of a SiOx suboxide layer at the HfO2/Si interface is unavoidable. The HfO2 thickness and suboxide formation are highly affected by the growth parameters such as sputtering power, O-2/Ar gas ratio during sputtering, sputtering time, and substrate temperature. XRD spectra show that the deposited film has (111) monoclinic phase of HfO2, which is also supported by FTIR spectra. The atomic concentration and chemical environment of Si, Hf, and O have been measured as a function of depth starting from the surface of the sample by XPS technique. It shows that HfO2 layers of a few nanometers are formed at the top surface. Below this thin layer, Si-Si bonds are detected just before the Si suboxide layer, and then the Si substrate is reached during the depth profiling by XPS. It is clearly understood that the highly reactive sputtered Hf atoms consume some of the oxygen atoms from the underlying SiO2 to form HfO2, leaving Si-Si bonds behind.

Subject Keywords

General Physics and Astronomy

URI

https://hdl.handle.net/11511/36511

Journal

JOURNAL OF APPLIED PHYSICS

DOI

https://doi.org/10.1063/1.3153953

Collections

Test and Measurement Center In advanced Technologies (MERKEZ LABORATUVARI), Article

Suggestions

OpenMETU
Core

Direct magnetic imaging of ferromagnetic domain structures by room temperature scanning hall probe microscopy using a bismuth micro-hall probe SANDHU, ADARSH; MASUDA, HİROSHİ; Oral, Ahmet; BENDİNG, SİMON J (IOP Publishing, 2001-05-15) A bismuth micro-Hall probe sensor with an integrated scanning tunnelling microscope tip was incorporated into a room temperature scanning Hall probe microscope system and successfully used for the direct magnetic imaging of microscopic domains of low coercivity perpendicular garnet thin films and demagnetized strontium ferrite permanent magnets. At a driving current of 800 muA, the Hall coefficient, magnetic field sensitivity and spatial resolution of the Bi probe were 3.3 x 10(-4) Omega /G, 0.38 G/root Hz ...
Optical absorption and reflection studies of Tl4InGa3S8 layered single crystals Goksen, K.; Hasanlı, Nızamı; Ozkan, H. (Institute of Physics, Polish Academy of Sciences, 2007-07-01) The optical properties of Tl4InGa3S8 layered single crystals have been studied by means of transmission and reflection measurements in the wavelength region between 400 and 1100 nm. The analysis of the room temperature absorption data revealed the presence of both optical indirect and direct transitions with band gap energies of 2.40 and 2.61 eV, respectively. Transmission measurements carried out in the temperature range of 10-300 K revealed the rate of change of the indirect band gap with temperature as g...
Properties of Neon, Magnesium, and Silicon Primary Cosmic Rays Results from the Alpha Magnetic Spectrometer Aguilar, M.; et. al. (American Physical Society (APS), 2020-05-29) We report the observation of new properties of primary cosmic rays, neon (Ne), magnesium (Mg), and silicon (Si), measured in the rigidity range 2.15 GV to 3.0 TV with 1.8 x 10(6) Ne, 2.2 x 10(6) Mg, and 1.6 x 10(6) Si nuclei collected by the Alpha Magnetic Spectrometer experiment on the International Space Station. The Ne and Mg spectra have identical rigidity dependence above 3.65 GV. The three spectra have identical rigidity dependence above 86.5 GV, deviate from a single power law above 200 GV, and harde...
CHAOTIC ELECTRON TRAJECTORIES IN ELECTROMAGNETIC WIGGLER FREE-ELECTRON LASER WITH A GUIDE MAGNETIC-FIELD BILIKMEN, S; OMAR, A (Springer Science and Business Media LLC, 1994-05-01) The Hamiltonian for an electron travelling through a large-amplitude backward electromagnetic wave, an axial guide magnetic field and radiation field is formulated. Poincare surface-of-section plots show that this Hamiltonian is non-integrable, and leads to chaotic trajectories. Equilibrium conditions are derived in the limit where the radiation field approaches zero. Compared to conventional FEL, the total energy of the system at pondermotive resonance E(c) is large, while the electron's critical energy...
Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream Tanisli, Murat; Rafatov, İsmail; Sahin, Neslihan; Mertadam, Sercan; Demir, Suleyman (Canadian Science Publishing, 2017-02-01) In this study, the characteristic properties and plasma parameters of capacitive radio frequency (RF) argon (Ar) discharge and supplementary discharge at low pressure are investigated with optical emission spectroscopy (OES). The wavelengths of spectral lines from OES are obtained between 650-900 nm. Using OES lines and related experimental data, the electron temperatures for different RF power, flow, and measurement periods are determined. Eventually, the properties of plasma including the electron tempera...

Citation Formats

G. AYGÜN ÖZYÜZER and İ. Yıldız, “Interfacial and structural properties of sputtered HfO2 layers,” JOURNAL OF APPLIED PHYSICS, pp. 0–0, 2009, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/36511.