AN AUTOMATIC MODE MATCHING SYSTEM FOR A HIGH Q-FACTOR MEMS GYROSCOPE USING A DECOUPLED PERTURBATION SIGNAL

Date

2015-06-25

Author

Yesil, F.
Alper, S. E.
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

315
views

0
downloads

This paper reports a closed-loop controller system developed for in-run automatic matching of the drive and sense mode resonance frequencies of a MEMS gyroscope with a high quality factor (Q). This is achieved by injecting a perturbation signal to the quadrature cancellation loop, while keeping it decoupled from the angular rate control loop. The new controller is implemented in a CMOS ASIC together with the other sensor control loops, and it is verified to maintain matched-mode state under changing environmental conditions. The system reduces the overall output noise of the tested MEMS gyroscope by a factor of 6; truly reaching down to the thermo-mechanical noise floor of 0.4 (degrees/hr)/Hz(1/2).

Subject Keywords

MEMS gyroscope, In-run mode-matching, Perturbation signal based mode-matching

URI

https://hdl.handle.net/11511/42463

DOI

https://doi.org/10.1109/transducers.2015.7181131

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A symmetric surface micromachined gyroscope with decoupled oscillation modes Alper, Said Emre; Akın, Tayfun (2001-06-14) This paper reports a new symmetric gyroscope structure that allows not only matched resonant frequencies for the drive and sense vibration modes for better resolution, but also decoupled drive and sense oscillation modes for preventing unstable operation due to mechanical coupling. The symmetry and decoupling features are achieved at the same time with a new suspension beam design. The gyroscope structure is designed using a standard three-layer polysilicon surface micromachining process (MUMPs) and simulat...
An Optimized Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes Eminoglu, Burak; Alper, Said Emre; Akın, Tayfun (2011-09-07) This paper presents an optimized analytical design procedure for the drive mode analog controllers used in vibratory MEMS gyroscopes. The behaviour of the controller during start-up is analyzed in detail including the effect of the limited voltage swing of the controller circuitry. As a result, an optimum design procedure is developed for controller design, which is also experimentally verified in a practical implementation demonstrating a settling time of only 50msec without any overshoot, for a gyroscope ...
An adjustable impedance matching network using RF MEMS technology Ünlü, Mehmet; Demir, Şimşek; Akın, Tayfun; Department of Electrical and Electronics Engineering (2003) This thesis presents design, modeling, and fabrication of an RF MEMS adjustable impedance matching network. The device employs the basic triple stub matching technique for impedance matching. It has three adjustable length stubs which are implemented using capacitively loaded coplanar waveguides. The capacitive loading of the stubs are realized using the MEMS switches which are evenly distributed over the stubs. There are 40 MEMS bridges on each stub whichare separated with ?/40 spacing making a total of 12...
A high performance automatic mode-matched MEMS gyroscope with an improved thermal stability of the scale factor Sonmezoglu, S.; Alper, S.E.; Akın, Tayfun (2013-06-20) This paper presents a high performance, automatic mode-matched, single-mass, and fully-decoupled MEMS gyroscope with improved scale factor stability. The mode-matching system automatically achieves and maintains the matching between the drive and sense mode resonance frequencies with the help of dedicated frequency tuning electrodes (FTEs). This method isolates the drive and sense mode frequency response dynamics by keeping the proof mass voltage (V PM ) constant, improving the scale factor stability up to ...
An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode Akın, Tayfun; Bradley, R.M. (1995-06-29) This paper reports the development of an implantable, fully integrated, single-chip, multichannel neural recording system, which is powered and communicated with using an RF telemetry link. The system allows recording of /spl plusmn/500/spl mu/V neural signals from axons regenerated through a micromachined silicon sieve electrode. These signals are amplified using on-chip 100Hz to 3.IkHz bandlimited amplifiers, multiplexed, and digitized with a low-power, high speed current-mode 8-bit ADC, and then transmit...

Citation Formats

F. Yesil, S. E. Alper, and T. Akın, “AN AUTOMATIC MODE MATCHING SYSTEM FOR A HIGH Q-FACTOR MEMS GYROSCOPE USING A DECOUPLED PERTURBATION SIGNAL,” 2015, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42463.