Çip-Üstü-Laboratuvar Uygulamaları için Elektrostatik Mikro Kapak Tasarımı

Bu bildiri, yüzey mikro işleme yöntemleriyle, çip-üstülaboratuvar (lab-on-a-chip) uygulamaları için üretilmiş yeni bir elektrostatik tahrikli mikro kapak tasarımını ve üretimini anlatmaktadır. Çip-üstü-laboratuvar uygulamaları genellikle düzlem içi mikro akışlar içermektedir. Burada anlatılan mikro kapak, düzlem içi akışa paralel bir diyaframın, elektrostatik kuvvetler yardımıyla akış yönüne dik olarak hareket ettirilmesi yöntemiyle çalışmaktadır. Bildiride, mikro kapağın çalışma prensipleri sunulmuş, kapağın çalışması gösterilmiştir.


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Citation Formats
E. Yıldırım and H. Külah, “Çip-Üstü-Laboratuvar Uygulamaları için Elektrostatik Mikro Kapak Tasarımı,” 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42984.