Çip-Üstü-Laboratuvar Uygulamaları için Elektrostatik Mikro Kapak Tasarımı

Date

2010-04-21

Author

Yıldırım, Ender
Külah, Haluk

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Bu bildiri, yüzey mikro işleme yöntemleriyle, çip-üstülaboratuvar (lab-on-a-chip) uygulamaları için üretilmiş yeni bir elektrostatik tahrikli mikro kapak tasarımını ve üretimini anlatmaktadır. Çip-üstü-laboratuvar uygulamaları genellikle düzlem içi mikro akışlar içermektedir. Burada anlatılan mikro kapak, düzlem içi akışa paralel bir diyaframın, elektrostatik kuvvetler yardımıyla akış yönüne dik olarak hareket ettirilmesi yöntemiyle çalışmaktadır. Bildiride, mikro kapağın çalışma prensipleri sunulmuş, kapağın çalışması gösterilmiştir.

Subject Keywords

Electrostatics, Microvalves, Lab-on-a-chip, Micromechanical devices, Micromachining, Valves, DNA

URI

https://hdl.handle.net/11511/42984

DOI

https://doi.org/10.1109/biyomut.2010.5479784

Collections

Department of Mechanical Engineering, Conference / Seminar

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Citation Formats

E. Yıldırım and H. Külah, “Çip-Üstü-Laboratuvar Uygulamaları için Elektrostatik Mikro Kapak Tasarımı,” 2010, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/42984.