Characterization of cross-coupling in capacitive micromachined ultrasonic transducers

Date

2005-01-01

Author

Bayram, Barış
Yaralioglu, GG
Oralkan, O
Lin, DS
Zhuang, XF
Ergun, AS
Sarioglu, AF
Wong, SH
Khuri-Yakub, BT

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

128
views

0
downloads

This paper analyzes element-to-element and cell-to-cell cross-coupling in capacitive micromachined ultrasonic transducers (cMUTs) using an interferometer. In a 1-D linear cMUT array immersed in oil, a single element was excited, and membrane displacements were measured at different positions along the array with an interferometer. Electrical measurements of the received voltage on each array element were also performed simultaneously to verify the optical measurements. The array was then covered with a polydimethylsiloxane (PDMS) layer, and the cross-coupling measurements were repeated. The cross-coupling levels for conventional and collapsed operation of the cMUT were compared. Since the cMUTs were immersed in oil, the optical measurements were corrected for acousto-optic interaction, and the results were reviewed in time-spatial and frequency-spatial domains. The main cross-coupling mechanism was due to the dispersive guided modes supported by the membrane periodicity. In both modes of operation, cross-coupling dispersion curves predicted a gradual reduction in phase velocity at higher frequencies. At lower frequencies, this phase velocity tended to approach 1480 m/s asymptotically. Better cross-coupling suppression was observed in the collapsed (-34 dB) than the conventional operation (-23 dB). The element-to-element cross-coupling experiments showed that a 5-mu m PDMS layer reduced the measured cross-coupling levels down to -39 dB in the collapsed operation

URI

https://hdl.handle.net/11511/52190

DOI

https://doi.org/10.1109/ultsym.2005.1602924

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

Experimental characterization of collapse-mode CMUT operation Oralkan, Omer; Bayram, Barış; Yaralioglu, Goksen G.; Ergun, A. Sanli; Kupnik, Mario; Yeh, David T.; Wygant, Ira O.; Khuri-Yakub, Butrus T. (2006-08-01) This paper reports on the experimental characterization of collapse-mode operation of capacitive micromachined ultrasonic transducers (CMUTs). CMUTs are conventionally operated by applying a direct current (DC) bias voltage less than the collapse voltage of the membrane, so that the membrane is deflected toward the bottom electrode. In the conventional regime, there is no contact between the membrane and the substrate; the maximum alternating current (AC) displacement occurs at the center of the membrane. I...
Characterization of the distribution of rotational torque on electrorotation chips with 3D electrodes Bahrieh, Garsha; Ozgur, Ebru; Koyuncuoglu, Aziz; Erdem, Murat; Gündüz, Ufuk; Külah, Haluk (2015-08-01) This is a study of in-plane and out-of-plane distribution of rotational torque (ROT-T) and effective electric field (EEF) on electrorotation (ER) devices with 3D electrodes using finite element modeling (FEM) and experimental method. The objective of this study is to investigate electrical characteristics of the ER devices with five different electrode geometries and obtain an optimum structure for ER experiments. Further, it provides a comparison between characteristics of the 3D electrodes and traditional...
Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors Kangul, Mustafa; Aydin, Eren; Gokce, Furkan; Zorlu, Ozge; Külah, Haluk (2017-12-01) This paper presents the investigation of two different capacitive feedthrough current elimination methods with an analysis of the effect of the capacitive feedthrough current on the resonance characteristics of electrostatically actuated and sensed resonant MEMS sensors. Electrostatically actuated and sensed resonators have various applications, such as accelerometers, gyroscopes, mass sensors, and temperature sensors. In most of these applications, as sensitivity increases, gain decreases. The capacitive f...
Analysis of Field-Effect Passivation in Textured and Undiffused Silicon Surfaces Turkay, Deniz; Koroglu, Cagil; Yerci, Selçuk (2019-09-13) In this work, we present a numerical analysis comparing the field-effect passivation provided by fixed dielectric charges on planar and textured undiffused silicon surfaces. We focus particularly on the ratio of effective surface recombination velocities (S-eff) of planar and textured surfaces (sigma=S-eff,S-textured/S-eff,S-planar) utilizing the same fixed dielectric charge density (Q(f)) under the same injection conditions. To ensure a difference between the space-charge region profiles of textured and pl...
Design of Microstrip Quadruplet Filters on Filpro Oruc, Sacid; Yıldırım, Nevzat (2018-11-02) In this paper, a simple dimensional design procedure is developed for microstrip/stripline quadruplet filters by starting with direct BP synthesis of a lumped quadruplet with inverter couplings, K14, K12, K23 and K34. K14 is the cross-coupling inverter which creates a symmetric pair of finite transmission zeros (FTZ's) if the sign of K14 is opposite of the other inverters while a complex TZ is created if K14 has the same sign as the other inverters leading to linear phase (flat delay) responses. The LC reso...

Citation Formats

B. Bayram et al., “Characterization of cross-coupling in capacitive micromachined ultrasonic transducers,” 2005, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52190.