High-performance SOI-MEMS gyroscope with decoupled oscillation modes

Date

2006-01-26

Author

Alper, Se
Azgın, Kıvanç
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

171
views

0
downloads

This paper presents a new, high-performance SOI-MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical crosstalk, demonstrating a measured noise-equivalent rate of 90 (deg/hr)/Hz(1/2) even at atmospheric pressure. The angular rate sensitivity of the gyroscope is 100 mu V/(deg/sec) at atmospheric pressure. This value improves to 2.4mV/(deg/sec) at vacuum, for which the measured noise-equivalent rate of the gyroscope reaches to 35 (deg/hr)/Hz(1/2). The R-2-nonlinearity of the gyroscope is measured to be better than 0.02%. The gyroscope has a low quadrature signal of 70deg/sec and a short-term bias stability of 1.5deg/sec.

Subject Keywords

Insulating substrate

URI

https://hdl.handle.net/11511/52863

Conference Name

19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006)

Collections

Department of Mechanical Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun (Elsevier BV, 2007-03-30) This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The fabricated gyroscope has minimum capacitive sense gaps of 2.6 mu m and a structural silicon thickness of 25 mu m,...
High Performance Harmonic Isolation and Load Voltage Regulation of the Three-Phase Series Active Filter Utilizing the Waveform Reconstruction Method Sentuerk, Osman S.; Hava, Ahmet Masum (2008-10-09) This paper develops the Waveform Reconstruction Method (WRM) for high accuracy and bandwidth signal decomposition of voltage harmonic type (V-type) three-phase diode rectifier load voltage into its harmonic and fundamental components, which are utilized in the Series Active Filter (SAF) control algorithms. The SAF compensated system utilizing WRM provides high performance load harmonic voltage isolation and load voltage regulation at steady-state and during transients compared to the system utilizing the sy...
High Performance Harmonic Isolation By Means of The Single-phase Series Active Filter Employing The Waveform Reconstruction Method Senturk, Osman S.; Hava, Ahmet Masum (2009-09-24) This paper proposes the Waveform Reconstruction Method (WRM), which is utilized in the single-phase Series Active Filter's (SAF's) control algorithm, in order to extract the load harmonic voltage component of voltage harmonic type single-phase diode rectifier loads. Employing WRM and the line current sampling delay reduction method (SDRM), a single-phase SAF compensated system provides higher harmonic isolation performance and higher stability margins compared to the system using conventional synchronous re...
Low-cost uncooled infrared detector arrays in standard CMOS Eminoglu, S; Tanrikulu, MY; Akın, Tayfun (2003-04-25) This paper reports the development of a low-cost 128 x 128 uncooled infrared focal plane array (FPA) based on suspended and thermally isolated CMOS p(+)-active/n-well diodes. The FPA is fabricated using a standard 0.35 mum CMOS process followed by simple post-CMOS bulk micromachining that does not require any critical lithography or complicated deposition steps; and therefore, the cost of the uncooled FPA is almost equal to the cost of the CMOS chip. The post-CMOS fabrication steps include an RIE etching to...
A single mass two-axis capacitive MEMS accelerometer with force rebalance Köse, Talha; Terzioʇlu, Yunus; Azgın, Kıvanç; Akın, Tayfun (2015-03-26) This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the ...

Citation Formats

S. Alper, K. Azgın, and T. Akın, “High-performance SOI-MEMS gyroscope with decoupled oscillation modes,” presented at the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, 2006, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52863.