SIMULTANEOUS DETECTION OF LINEAR AND CORIOLIS ACCELERATIONS ON A MODE-MATCHED MEMS GYROSCOPE

2014-01-30
Sonmezoglu, S.
Gavcar, H. D.
Azgın, Kıvanç
Alper, S. E.
Akın, Tayfun
This paper presents a novel "in operation acceleration sensing and compensation method" for a single-mass mode-matched MEMS gyroscope. In this method, the amplitudes of the sustained residual quadrature signals on the differential sense-mode electrodes are compared to measure the linear acceleration acting on the sense-axis of the gyroscope. By measuring the acceleration acting along the sense-axis, the g-sensitivity of the gyroscope output to these accelerations is mitigated without using a dedicated accelerometer. It has been experimentally demonstrated that the g-sensitivity of the studied gyroscope is substantially reduced from 1.08 degrees/s/g to 0.04 degrees/s/g, and the effect of the linear acceleration on the gyroscope output is highly-suppressed (by 96%) with the use of the compensation method proposed in this work.

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Citation Formats
S. Sonmezoglu, H. D. Gavcar, K. Azgın, S. E. Alper, and T. Akın, “SIMULTANEOUS DETECTION OF LINEAR AND CORIOLIS ACCELERATIONS ON A MODE-MATCHED MEMS GYROSCOPE,” presented at the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, 2014, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54750.