SIMULTANEOUS DETECTION OF LINEAR AND CORIOLIS ACCELERATIONS ON A MODE-MATCHED MEMS GYROSCOPE

2014-01-30
Sonmezoglu, S.
Gavcar, H. D.
Azgın, Kıvanç
Alper, S. E.
Akın, Tayfun
This paper presents a novel "in operation acceleration sensing and compensation method" for a single-mass mode-matched MEMS gyroscope. In this method, the amplitudes of the sustained residual quadrature signals on the differential sense-mode electrodes are compared to measure the linear acceleration acting on the sense-axis of the gyroscope. By measuring the acceleration acting along the sense-axis, the g-sensitivity of the gyroscope output to these accelerations is mitigated without using a dedicated accelerometer. It has been experimentally demonstrated that the g-sensitivity of the studied gyroscope is substantially reduced from 1.08 degrees/s/g to 0.04 degrees/s/g, and the effect of the linear acceleration on the gyroscope output is highly-suppressed (by 96%) with the use of the compensation method proposed in this work.
Citation Formats
S. Sonmezoglu, H. D. Gavcar, K. Azgın, S. E. Alper, and T. Akın, “SIMULTANEOUS DETECTION OF LINEAR AND CORIOLIS ACCELERATIONS ON A MODE-MATCHED MEMS GYROSCOPE,” presented at the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, CA, 2014, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54750.