Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application

Date

2007-08-27

Author

Demir, Pinar
KAÇAR, ELİF
AKMAN, ERHAN
Bilikmen, Sinan Kadri
DEMİR, ARİF

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Extreme ultraviolet lithography (EUVL) requires an emission of soft x-rays around a wavelength region of 13.5 nm. EHYBRID simulation was made under the laser operation at 1064 nm with a pulse duration of 6 ns. Intensity was changed between 1 x 10(12) W/cm(2) and 5 x 10(12) W/cm(2). Soft X-rays emitted from Sri XII and Sri XIII ions were simulated by using the EHYBRID code. Ion Fractions of the tin ions and the line intensities for different electron temperatures were calculated by using the collisional radiative code NeF.

Subject Keywords

Extreme Ultraviolet Lithography, Tin Plasmas, Hydrodynamic Modelling, Collisional Radiative Modelling

URI

https://hdl.handle.net/11511/68009

DOI

https://doi.org/10.1117/12.733149

Conference Name

Conference on Ultrafast X-Ray Sources and Detectors

Collections

Department of Physics, Conference / Seminar

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Citation Formats

P. Demir, E. KAÇAR, E. AKMAN, S. K. Bilikmen, and A. DEMİR, “Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application,” San Diego, CA, 2007, vol. 6703, p. 0, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/68009.