An electrohydraulic vibration testing machine.

Akgün, Servet


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This paper presents an energy harvesting electromagnetic MEMS sensor that can detect the frequency of environmental vibrations. The device is composed of a number of serially connected coils that are fabricated on parylene cantilevers in different lengths, and can output the frequency content of ambient vibrations while harvesting electrical energy in a wide band of predetermined frequency range (3.7-4.7 kHz). The sensor generates an output voltage at the ambient vibration frequency by virtue of the relativ...
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Citation Formats
S. Akgün, “An electrohydraulic vibration testing machine.,” Middle East Technical University, 1978.