MODELING OF A CAPACITIVE Sigma-Delta MEMS ACCELEROMETER SYSTEM INCLUDING THE NOISE COMPONENTS AND VERIFICATION WITH TEST RESULTS

Date

2009-01-29

Author

Boga, Biter
Ocak, Ilker Ender
Külah, Haluk
Akın, Tayfun

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This paper presents a detailed SIMULINK model for a conventional capacitive Sigma-Delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e. g. decimation filters). By using this model, it is possible to estimate the performance of the full system, including the effect of individual noise components, operation range, scale factor, etc. The model has been verified through test results using a lateral accelerometer, full-custom designed 2nd-order Sigma-Delta readout electronics, and a signal processing unit implemented on PIC. The implemented system operates at 500 kHz sampling rate and has 0.53 V/ g open-loop sensitivity, 58.7 mu g/root Hz resolution, +/-12g operation range, and 0.97e-6 g/(output units) scale factor, where these numbers are in close agreement with the estimated results.

Subject Keywords

Micromechanical devices, Signal sampling, Signal processing, System testing, Delta-sigma modulation, Readout electronics, Electronic equipment testing, Filters, Signal design, Accelerometers

URI

https://hdl.handle.net/11511/41238

DOI

https://doi.org/10.1109/memsys.2009.4805509

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

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Citation Formats

B. Boga, I. E. Ocak, H. Külah, and T. Akın, “MODELING OF A CAPACITIVE Sigma-Delta MEMS ACCELEROMETER SYSTEM INCLUDING THE NOISE COMPONENTS AND VERIFICATION WITH TEST RESULTS,” 2009, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/41238.