MODELING OF A CAPACITIVE Sigma-Delta MEMS ACCELEROMETER SYSTEM INCLUDING THE NOISE COMPONENTS AND VERIFICATION WITH TEST RESULTS

Date

2009-01-29

Author

Boga, Biter
Ocak, Ilker Ender
Külah, Haluk
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

175
views

0
downloads

This paper presents a detailed SIMULINK model for a conventional capacitive Sigma-Delta accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e. g. decimation filters). By using this model, it is possible to estimate the performance of the full system, including the effect of individual noise components, operation range, scale factor, etc. The model has been verified through test results using a lateral accelerometer, full-custom designed 2nd-order Sigma-Delta readout electronics, and a signal processing unit implemented on PIC. The implemented system operates at 500 kHz sampling rate and has 0.53 V/ g open-loop sensitivity, 58.7 mu g/root Hz resolution, +/-12g operation range, and 0.97e-6 g/(output units) scale factor, where these numbers are in close agreement with the estimated results.

Subject Keywords

Micromechanical devices, Signal sampling, Signal processing, System testing, Delta-sigma modulation, Readout electronics, Electronic equipment testing, Filters, Signal design, Accelerometers

URI

https://hdl.handle.net/11511/41238

DOI

https://doi.org/10.1109/memsys.2009.4805509

Collections

Department of Electrical and Electronics Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

Modelling and noise analysis of closed-loop capacitive sigma-delta mems accelerometer Boğa, Biter; Külah, Haluk; Department of Electrical and Electronics Engineering (2009) This thesis presents a detailed SIMULINK model for a conventional capacitive Σ-Δ accelerometer system consisting of a MEMS accelerometer, closed-loop readout electronics, and signal processing units (e.g. decimation filters). By using this model, it is possible to estimate the performance of the full accelerometer system including individual noise components, operation range, open loop sensitivity, scale factor, etc. The developed model has been verified through test results using a capacitive MEMS accelero...
On the Eigenstructure of DFT Matrices Candan, Çağatay (Institute of Electrical and Electronics Engineers (IEEE), 2011-03-01) The discrete Fourier transform (DFT) not only enables fast implementation of the discrete convolution operation, which is critical for the efficient processing of analog signals through digital means, but it also represents a rich and beautiful analytical structure that is interesting on its own. A typical senior-level digital signal processing (DSP) course involves a fairly detailed treatment of DFT and a list of related topics, such as circular shift, correlation, convolution operations, and the connectio...
Modeling and simulation of a navigation system with an IMU and a Magnetometer Kayasal, Uğur; Özgören, Mustafa Kemal; Department of Mechanical Engineering (2007) In this thesis, the integration of a MEMS based inertial measurement unit and a three axis solid state magnetometer are studied. It is a fact that unaided inertial navigation systems, especially low cost MEMS based navigation systems have a divergent behavior. Nowadays, many navigation systems use GPS aiding to improve the performance, but GPS may not be applicable in some cases. Also, GPS provides the position and velocity reference whereas the attitude information is extracted through estimation filters. ...
Analysis and design of passive microwave and optical devices using the multimode interference technique Sunay, Ahmet Sertaç; Birand, Mehmet Tuncay; Department of Electrical and Electronics Engineering (2005) The Multimode Interference (MMI) mechanism is a powerful toool used in the analysis and design of a certain class of optical, microwave and millimeter wave devices. The principles of the MMI method and the self-imaging principle is described. Using this method, NXM MMI couplers, MMI splitter/combiners are analyzed. Computer simulations for illustrating the "Multimode Interference Mechanism" are carried out. The MMI approach is used to analyze overmoded 'rectangular metallic' and 'dielectric slab' type of wa...
Modeling, Analysis and Control of an Isolated Boost Converter for System Level Studies Zahedi, Bijan; Norum, Lars E. (2011-09-10) This paper performs a modeling of an isolated full bridge boost converter that suits the system level studies of power electronic -based systems. For system level studies, in which large signal models must be developed, linearized average value models are invalid. Large signal analysis can be carried out by nonlinear State Space models. In this paper generalized state space averaging method is adopted to include ripple modeling for higher accuracy. The obtained model is compared to a number of other averagi...

Citation Formats

B. Boga, I. E. Ocak, H. Külah, and T. Akın, “MODELING OF A CAPACITIVE Sigma-Delta MEMS ACCELEROMETER SYSTEM INCLUDING THE NOISE COMPONENTS AND VERIFICATION WITH TEST RESULTS,” 2009, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/41238.