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Studies on the effect of electrode type and substrate temperature on plasma polymerization of two model compounds: Acrylonitrile and hexamethyldisiloxane

1990-4
Akovalı, Güneri
Dilsiz, Nursel
Polymers were prepared from saturated (HMDS) and unsaturated (AN) monomers in a radio frequency discharge (plasma). The effect of selected parameters such as electrode type (such as Cu, Zn, Ni, Al), reactor type, and substrate temperature (other parameters constant) on chemical structure and the rate of polymer deposition was examined by Fourier transform infrared (FTIR) spectroscopy. Differences in the nature of electrodes and reactor types were found to yield similar plasma products with similar rates of deposition for two monomers. In the tubular reactor used, deposition rates were observed to decrease with increasing substrate temperatures showing different dependencies on temperature for the monomers tested.