Temperature-Dependent Electrical Characteristics of Au/Si3N4/4H n-SiC MIS Diode

Yigiterol, F.
Güllü, Hasan Hüseyin
Bayraklı, Özge
Electrical characteristics of the Au/Si3N4/4H n-SiC metal–insulator-semiconductor (MIS) diode were investigated under the temperature, T, interval of 160–400 K using current–voltage (I–V), capacitance–voltage (C−V) and conductance–voltage (G/ω−V) measurements. Firstly, the Schottky diode parameters as zero-bias barrier height (ΦB0) and ideality factor (n) were calculated according to the thermionic emission (TE) from forward bias I–V analysis in the whole working T. Experimental results showed that the values of ΦB0 were in increasing behavior with increasing T while n values decreased with inverse proportionality in n versus ΦB0 plot. Therefore, the non-ideal I–V behavior with inhomogeneous barrier height (BH) formation has been discussed under the assumption of Gaussian distribution (GD). From the GD of BHs, the mean BH was found to be about 1.40 eV with 0.1697 standard deviation and the modified Richardson constant A∗ of this diode was obtained as 141.65 A/cm2 K2 in good agreement with the literature (the theoretical value of A∗ is 137.21 A/cm2 K2). The relationship between ΦB0 and n showed an abnormal I–V behavior depending on T, and it was modeled by TE theory with GD of BH due to the effect in inhomogeneous BH at the interface. Secondly, according to Cheung’s model, series resistance, RS values were calculated in the T range of 160–400 K and these values were found to decrease with increasing T. Finally, the density of interface states, Dit was calculated and the T dependence of energy distribution of Dit profiles determined the forward I−V measurements by taking into account the bias dependence of the effective BH, Φe and n. Dit were also calculated according to the Hill–Coleman method from C−V and G/ω−V analysis. Furthermore, the variation of Dit as a function of frequency, f and T were determined.


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Citation Formats
F. Yigiterol, H. H. Güllü, Ö. Bayraklı, and D. E. YILDIZ, “Temperature-Dependent Electrical Characteristics of Au/Si3N4/4H n-SiC MIS Diode,” JOURNAL OF ELECTRONIC MATERIALS, pp. 2979–2987, 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/52450.