An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism

Date

2007-01-25

Author

Azgın, Kıvanç
Akın, Tayfun

Metadata

Show full item record

This work is licensed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Item Usage Stats

165
views

0
downloads

This paper presents a new tuning fork gyroscope structure with a highly linear coupling mechanism that keeps the phases of the drive mode oscillating masses exactly opposite with the help of a symmetrically anchored ring-shaped spring. This structure eliminates the risk of drive mode instability due to any lower frequency structural modes and provides very linear drive mode oscillations together with very low g-sensitivity. The gyroscope is fabricated with the SOI-MUMPS process of MEMSCAP. The fabricated gyroscope has bias instability and angle random walk of 200 deg/hr and 5.47 deg/root hr, respectively, according to Allan Variance curve. The g-sensitivy and scale factor are measured as 9.3 (deg/hr)/g and 12mV/(deg/sec) with an R(2) nonlinearity of 0.05%.

URI

https://hdl.handle.net/11511/54341

Collections

Department of Mechanical Engineering, Conference / Seminar

Suggestions

OpenMETU
Core

A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate Alper, Said Emre; Akın, Tayfun (2005-08-01) This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemented using the dissolved wafer microelectromechanical systems (MEMS) process on an insulating substrate. The symmetric structure allows matched resonant frequencies for the drive and sense vibration modes for high-rate sensitivity and low temperature-dependent drift, while the decoupled drive and sense modes prevents unstable operation due to mechanical coupling, achieving low bias-drift. The 12-15-mu m-thick si...
An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth Sonmezoglu, Soner; Alper, Said Emre; Akın, Tayfun (Institute of Electrical and Electronics Engineers (IEEE), 2014-04-01) This paper presents the architecture and experimental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance mode frequencies. The system also allows adjusting the system bandwidth with the aid of the proportional-integral controller parameters of the sense-mode force-feedback controller, independently from the mechanical sensor bandwidth. This paper experimentally examines...
A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate Alper, SE; Akın, Tayfun (2003-06-12) This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC) gyroscope implemented using dissolved wafer process on an insulating substrate. The symmetric structure allows matched resonant frequencies for the drive and sense vibration modes for high rate sensitivity and low temperature-dependent drift, while the decoupled drive and sense modes prevents unstable operation due to mechanical coupling, achieving a low bias drift. The 12-15mum-thick single-crystal silicon structural layer with...
A Lorentz force MEMS magnetometer Pala, Sedat; Cicek, Meltem; Azgın, Kıvanç (2016-11-03) This paper presents a Lorentz force magnetometer with a MEMS resonator structure as a sensor. Magnetometer composed of a resonator and a grill structure. The grill structure reduces the heat generation due to the current required to generate the Lorentz force. The proposed sensor is produced with standard SOI micromachining processes with device layer thickness of 35 mu m. The natural frequency of resonator is around 83 kHz, Q-factor of 1870 at around 40 mTorr ambient pressure. Tests are done for 1.12 mT ma...
An automatically mode-matched MEMS gyroscope with 50 Hz bandwidth Sonmezoglu, S.; Alper, S.E.; Akın, Tayfun (2012-02-02) This paper presents the architecture and experimental verification of an automatic mode matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to accomplish and maintain the frequency matching condition. The system also allows controlling the system bandwidth by adjusting the closed loop controller parameters of the sense mode. This study experimentally examines the angle random walk (ARW) and bias instability performances of the fully decoupled MEM...

Citation Formats

K. Azgın and T. Akın, “An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism,” 2007, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/54341.