A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS

2017-06-22
Gokce, Furkan
Aydın, Eren
Kangül, Mustafa
Toral, Taylan B.
Zorlu, Ozge
Sardan-Sukas, Ozlem
Külah, Haluk
In this study, a fabrication method utilizing parylene bonding for gravimetric resonant based mass sensors is presented. First, parylene bonding was experimentally tested and compared with the literature. Average shear strength was measured as 16.3 MPa (sigma=3MPa). Then, resonators located on top of a microchannel for real-time detection were fabricated using the presented method. Simulations and experiments verify proper operation of the fabricated resonators, and the applicability of the method for fabricating similar resonant based sensors.
19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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Citation Formats
F. Gokce et al., “A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS,” presented at the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, TAIWAN, 2017, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/55535.