Show/Hide Menu
Hide/Show Apps
anonymousUser
Logout
Türkçe
Türkçe
Search
Search
Login
Login
OpenMETU
OpenMETU
About
About
Açık Bilim Politikası
Açık Bilim Politikası
Frequently Asked Questions
Frequently Asked Questions
Browse
Browse
By Issue Date
By Issue Date
Authors
Authors
Titles
Titles
Subjects
Subjects
Communities & Collections
Communities & Collections
A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS
Date
2017-06-22
Author
Gokce, Furkan
Aydın, Eren
Kangül, Mustafa
Toral, Taylan B.
Zorlu, Ozge
Sardan-Sukas, Ozlem
Külah, Haluk
Metadata
Show full item record
This work is licensed under a
Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License
.
Item Usage Stats
2
views
0
downloads
In this study, a fabrication method utilizing parylene bonding for gravimetric resonant based mass sensors is presented. First, parylene bonding was experimentally tested and compared with the literature. Average shear strength was measured as 16.3 MPa (sigma=3MPa). Then, resonators located on top of a microchannel for real-time detection were fabricated using the presented method. Simulations and experiments verify proper operation of the fabricated resonators, and the applicability of the method for fabricating similar resonant based sensors.
Subject Keywords
Parylene Bonding
,
Bio-MEMS
,
Gravimetric Sensors
,
Fabrication
,
Parylene Membrane
,
Lateral Mode Resonators
URI
https://hdl.handle.net/11511/55535
Collections
Department of Electrical and Electronics Engineering, Conference / Seminar