Mechanical and optical properties of SiO2 thin films deposited on glass

Date

2018-09-01

Author

Simurka, Lukas
Ctvrtlik, Radim
Tomastik, Jan
Bektaş, Gence
Svoboda, Jan
Bange, Klaus

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The optical and mechanical properties of amorphous SiO2 films deposited on soda-lime silicate float glass by reactive RF magnetron sputtering at room temperature were investigated in dependence of the process pressure. The densities of the films are strongly influenced by the process pressure and vary between 2.38 and 1.91 g cm(-3) as the pressure changes from 0.27 to 1.33 Pa. The refractive indices of the films shift between 1.52 and 1.37, while the residual compressive stresses in the deposited films vary in the range from 440 to 1 MPa. Hardness and reduced elastic modulus values follow the same trend and decline with the increase of process pressure from 8.5 to 2.2 GPa and from 73.7 to 30.9 GPa, respectively. The abrasive wear resistance decreases with the density of the films.

Subject Keywords

SiO2 films, Glass, Mechanical properties, Refractive index, Residual stress

URI

https://hdl.handle.net/11511/63007

Journal

CHEMICAL PAPERS

DOI

https://doi.org/10.1007/s11696-018-0420-z

Collections

Center for Solar Energy Research and Applications (GÜNAM), Article

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Citation Formats

L. Simurka, R. Ctvrtlik, J. Tomastik, G. Bektaş, J. Svoboda, and K. Bange, “Mechanical and optical properties of SiO2 thin films deposited on glass,” CHEMICAL PAPERS, pp. 2143–2151, 2018, Accessed: 00, 2020. [Online]. Available: https://hdl.handle.net/11511/63007.