A three axis capacitive MEMS accelerometer on a single substrate

Date

2017

Author

Aydemir, Akın
Akın, Tayfun

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The invention relates to a three axis capacitive mems accelerometer on a single substrate. In this invention a varying gap differential capacitive sensing three-axis accelerometer using SOI on glass process is introduced. The out of plane axis accelerometer which is developed in the present invention can be used for fabrication of either a three axis accelerometer with a single proof mass or an individual single axis accelerometers on the same substrate. Additionally the out of plane axis accelerometer which is developed in the present invention, the handle layer of the SOI wafer is used as packaging layer.

URI

https://hdl.handle.net/11511/70097

Collections

Department of Electrical and Electronics Engineering, Patent / Utility Model

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Citation Formats

A. Aydemir and T. Akın, “A three axis capacitive MEMS accelerometer on a single substrate,” 00, 2017.