Investigation of electromigration induced hillock and edge void dynamics on the interconnect surface by computer simulation

Download

index.pdf

Date

2004

Author

Çelik, Aytaç

Metadata

Show full item record

Item Usage Stats

222
views

522
downloads

The Electromigration-induced failure of metallic interconnects is a complicated process, which involves flux divergence, vacancy and atom accumulation with or without compositional variations, void and hillocks nucleation, growth and shape changes. Hillocks and surface void dynamics in connection with the critical morphological evaluation have been investigated in order to understand the conditions under which premature failure of metallic thin interconnects occur. In this thesis, an interconnect is idealized as a two dimensional electrically conducting strip which contains gaussian form hillock or edge void. Indirect boundary element is used to predict the evolution of the surface after the applied electric field. Computer simulation results show that the surface crystal structure of is extremely important in the determination of the life time of thin film single crystal interconnect lines. Under the applied electrostatic field not only the degree of rotational symmetry (parameter, m) but also the orientation of the surface plane play dominant role in the development of the surface topology and the formation of the fatal EM induced voids. The degree of anisotropy in the surface diffusion coefficient, and the intensity of the electron wind parameter may have great influence on the evolution regime actually taking place on the surfaces and at sidewalls of the interconnects.

Subject Keywords

Atomic physics., Constitution and Properties of Matter.

URI

http://etd.lib.metu.edu.tr/upload/2/12605300/index.pdf
https://hdl.handle.net/11511/14478

Collections

Graduate School of Natural and Applied Sciences, Thesis

Suggestions

OpenMETU
Core

Structural properties of homonuclear and heteronuclear atomic clusters : Monte Carlo simulation study Dugan, Nazım; Erkoç, Şakir; Department of Physics (2006) In this thesis study, a new method for finding the optimum geometries of atomic nanoparticles has been developed by modifying the well known diffusion Monte Carlo method which is used for electronic structure calculations of quantum mechanical systems. This method has been applied to homonuclear and heteronuclear atomic clusters with the aim of both testing the method and studying various properties of atomic clusters such as radial distribution of atoms and coordination numbers. Obtained results have been ...
Properties of light and heavy baryons in light cone qcd sum rules formalism Azizi, Kazem; Özpineci, Altuğ; Department of Physics (2009) In this thesis, we investigate the masses, form factors and magnetic dipole moments of some light octet, decuplet and heavy baryons containing a single heavy quark in the framework of the light cone QCD sum rules. The magnetic dipole moments can be measured considering radiative transitions within a multiplet or between multiplets. Analyzing the transitions among the baryons and calculating the above mentioned parameters can give us insight into the structure of those baryons. In analyzing the aforementione...
Study on the long wavelength SiGe/Si heterojunction internal photoemission infrared photodetectors Aslan, B; Turan, Raşit; Liu, HC (Elsevier BV, 2005-10-01) The theory of internal photoemission in semiconductor heterojunctions has been investigated and the existing model has been extended by incorporating the effect of different effective masses in the active region and the substrate, nonspherical-nonparabolic bands, and the energy loss per collision. Photoresponse measurements on Si1-xGex/Si heterojunction internal photoemission (HIP) infrared photodetectors (IP) have shown that they are fit well by the theory. Qualitative model describing the mechanisms of ph...
Physical properties of CdSe thin films produced by thermal evaporation and e-beam techniques Huş, Şaban Mustafa; Parlak, Mehmet; Department of Physics (2006) CdSe thin films were deposited by thermal evaporation and e-beam evaporation techniques on to well cleaned glass substrates. Low dose of boron have been implanted on a group of samples. EDAX and X-ray patterns revealed that almost stoichiometric polycrystalline films have been deposited in (002) preferred orientation. An analysis of optical measurements revealed a sharp increase in absorption coefficient below 700 nm and existence of a direct allowed transition. The calculated band gap was around 1.7 eV. Th...
Adsorption of gold atoms on anatase TiO2 (100)-1x1 surface Vural, Kıvılcım Başak; Ellialtıoğlu, Süleyman Şinasi; Department of Physics (2009) In this work the electronic and structural properties of anatase TiO2 (100) surface and gold adsorption have been investigated by using the first-principles calculations based on density functional theory (DFT). TiO2 is a wide band-gap material and to this effects it finds numerous applications in technology such as, cleaning of water, self-cleaning, coating, solar cells and so on. Primarily, the relation between the surface energy of the anatase (100)-1x1 phase and the TiO2-layers is examined. After an app...

Citation Formats

A. Çelik, “Investigation of electromigration induced hillock and edge void dynamics on the interconnect surface by computer simulation,” M.S. - Master of Science, Middle East Technical University, 2004.