Magnetically levitated accelerometer design

Download
2019
Ceylan, İlke
This thesis proposes the utilization of magnetic levitation for designing an acceleration sensor, taking the advantage of up-to-date contactless displacement sensing technology. The accelerometer is expected to have long-term robustness by isolating the proof mass from the rest of the accelerometer body, virtually eliminating mechanical friction and wear. Furthermore, levitated sensors have a great potential to achieve high precision. In this context, this study presents designing a levitated accelerometer, which suspends the proof mass and controls its position relative to the sensor body. When the sensor body moves, the shift of the proof mass with respect to the sensor body is detected and the control system produces feedback forces on the proof mass to keep the proof mass stationary with respect to the sensor body. In this study, a magnetically levitated accelerometer is designed, constructed and tested. Permanent magnets are used to offset the weight of the levitated proof mass. However, that is not enough to keep it steady and stable afloat. Hence, active magnetic actuation is utilized not only for levitation but also for position control of the proof mass. In the design phase, a mathematical model of the system is developed and a simulation model is built by using MATLAB®/Simulink®. Magnetic analyses are performed by using finite element method. PID controllers run independently in a digital microcontroller for position control in two axes and two rotations. Eddy current sensors are installed on the system to measure the relative position along those axes. Moreover, motor drivers are used to feed the proportional current to electromagnets and evaluate the current values on the solenoids by built in sensors. Tests are conducted in order to tune the controllers and finally compare the acceleration measurements with a commercial sensor. The measurement limit of accelerometer is measured as ± 0.6 g. Bias instability and velocity random walk values is calculated as 0.174 mg and 0.182 m/s/√h respectively.

Suggestions

Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate
Aydemir, Akin; Akın, Tayfun (2015-11-04)
This paper presents a new fabrication approach and a design for the fabrication of a three-axis capacitive MEMS accelerometer where differential sensing is enabled for all sense directions. In this approach, individual lateral and vertical axis accelerometers are fabricated in the same die on an SOI wafer which is eutectically bonded to a glass substrate. Differential sensing for the vertical axis accelerometer is realized by defining the proof mass of the accelerometer on the structural layer of the SOI wa...
Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer
Aydemir, Akin; Akın, Tayfun (2015-09-09)
This paper presents a new approach for the fabrication of a three-axis capacitive MEMS accelerometer that is capable of differentially sensing the acceleration in all three orthogonal axes. For the first time in literature, differential sensing for the out of plane direction is achieved by defining a movable sensing electrode on the structural layer of the SOI wafer that is sandwiched between two stationary electrodes defined on the glass substrate and the handle layer of the SOI wafer enabling the differen...
Magnetic Resonance - Electrical Impedance Tomography (MR-EIT) Research at METU
Eyüboğlu, Behçet Murat (2006-09-01)
Following development of magnetic resonance current density imaging (MRCDI), magnetic resonance - electrical impedance tomography (MR-EIT) has emerged as a promising approach to produce high resolution conductivity images. Electric current applied to a conductor results in a potential field and a magnetic flux density distribution. Using a magnetic resonance imaging (MRI) system, the magnetic flux density distribution can be reconstructed as in MRCDI. The flux density is related to the current density distr...
Magnetic and Structural Analysis of a Transverse Flux Claw Pole Linear Machine
Keysan, Ozan; Mueller, Markus A. (2013-01-01)
This paper details the design and testing of a novel transverse flux claw pole linear machine suitable for large superconducting generators. The machine utilises a modular claw pole transducer design with a stationary field winding which eliminates the need for cryogenic couplers and electrical brushes for a superconducting machine. The results from this prototype will enable a better understanding of the electromagnetic and mechanical structures before embarking on a more costly super-conducting design. Th...
Magnetic Resonance Electrical Impedance Tomography For Anisotropic Conductivity Imaging
Degirmenci, E.; Eyüboğlu, Behçet Murat (2008-11-27)
Magnetic Resonance Electrical Impedance Tomography (MREIT) brings high resolution imaging of true conductivity distribution to reality. MREIT images are reconstructed based on measurements of current density distribution and a surface potential value, induced by an externally applied current flow. Since biological tissues may be anisotropic, isotropic conductivity assumption, as it is adopted in most of MREIT reconstruction algorithms, introduces reconstruction inaccuracy. In this study, a novel algorithm i...
Citation Formats
İ. Ceylan, “Magnetically levitated accelerometer design,” Thesis (M.S.) -- Graduate School of Natural and Applied Sciences. Mechanical Engineering., Middle East Technical University, 2019.